Pii: S0040-6090(00)00732-x

Nitrogenated, tetrahedral amorphous carbon (ta-C) ®lms prepared by the ®ltered cathodic vacuum arc (FCVA) technique have been studied using ultraviolet (UV, 244 nm) and visible (514 nm) micro-Raman scattering. The nitrogen ions were produced by a RF ion-beam source with a nitrogen ̄ow-rate varying from 0 to 10.0 sccm, which results in a nitrogen content from 0 to 10.8 at.% in the deposited ®lms. In the visible Raman spectra, only vibrational modes of sp-bonded carbon (G and D peaks) are observed, while a new wide peak, called the T peak, located at 1090±1320 cm, associated with the vibrational mode of sp-bonded carbon, appears in the UV-Raman spectra. In the visible Raman spectra, the G-peak width (100±113 cm) and the intensity ratio ID/IG (0.34±0.94) are both sensitive to the structural changes induced by N incorporation. In the UV-Raman spectra, the G-peak position almost linearly decreases from 1665 to 1610 cm, and the Tpeak position increases tremendously from 1095 to 1314 cm with increasing N content. The G-peak position and width, and the T-peak position, are all sensitive to the bonding structure of the ®lms. q 2000 Elsevier Science S.A. All rights reserved.